Ultralight soft electrostatic actuators based on solid-liquid-gas architectures.

Soft actuators enable versatile and adaptable robots capable of operating in unstructured environments and close to humans. Soft electrostatic actuators utilizing electrohydraulic principles are particularly promising, combining all-around actuation performance with portable driving electronics. These electrohydraulic actuators harness liquid dielectrics enclosed in solid dielectric shells to sustain high electric fields; the liquid dielectric however constitutes most of the actuator mass, limiting power-to-weight ratio. Here, we present ultralight soft electrostatic actuators based on solid-liquid-gas architectures: the introduction of gaseous dielectrics as a third phase substantially improves power-to-weight ratio by reducing actuator mass and increasing actuation speed. Through theoretical and experimental analyses, we pinpoint the fundamental performance limit as the electrical breakdown in the gas, governed by Paschen's law, thereby providing a guideline for selection of gaseous dielectrics. Using the Peano-HASEL (hydraulically amplified self-healing electrostatic) actuator as a model system, we identify a gas mixture of C