ArticleNature communications2026
Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment.
Article in Nature communications, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
1 citing paper in PubMed.
- Giant piezoelectric response and electromechanical coupling in AlScN thin films via multi-scale lattice engineering.Nature communications · 2026Article
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Authors and funding
16 authors.
Funding
Abstract
The demand for high-performance filters in next-generation wireless communication systems underscores the limited electromechanical coupling of aluminum nitride-based film bulk acoustic resonators. Scandium incorporation enhances piezoelectricity but is hindered by crystallinity degradation and polarity inversion. Theoretical modeling reveals the polarity inversion interface between aluminum nitride and scandium-doped aluminum nitride as a key cause of piezoelectric degradation. This work proposes a dual-optimization strategy that improves crystalline alignment and eliminates polarity mismatch. A single-crystalline aluminum nitride seed layer promotes high c-axis oriented scandium-doped aluminum nitride films, yielding resonators with a maximum quality factor of 736. Subsequent seed layer removal eliminates the polarity inversion interface, raising the effective electromechanical coupling coefficient of resonators from 6.0% to 13.2%. Filters fabricated with this strategy achieve a center frequency of 6.4 GHz, a 3 dB bandwidth of 740 MHz, and out-of-band rejection above 40 dB, indicating potential for Sub-7 GHz communication systems.
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Registered trials
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