Dual-Electrodes PMUTs on Glasses for Wearable Human Blink Monitoring.

Blink monitoring has demonstrated significant application value in fields such as safety assessments, medical monitoring, and intelligent technologies. Traditional eye monitoring methods are limited by restricted adaptability, insufficient comfort, or potential risks. MEMS-based ultrasonic technology, as a non-contact approach, has garnered attention due to its strong environmental adaptability, privacy, and security. However, existing designs require high-sensitivity processing circuits and are incompatible with standard fabrication processes. This work proposes a dual-electrode piezoelectric micro-mechanical ultrasonic transducer (PMUT) design based on aluminum nitride (AlN) piezoelectric thin films, integrated into a glasses device to enable real-time blink activity monitoring. The design successfully identifies blink states through time-of-flight (TOF) pulse-echo technology and dynamic unsupervised learning methods. Fabricated using cost-effective standard multi-user MEMS processes, this device offers distinct merits in terms of wearability comfort, information security, biosafety, and reliability.