ArticleMicromachines2025
Design and Vision-Based Calibration of a Five-Axis Precision Dispensing Machine.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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6 authors.
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Abstract
Five-axis precision dispensing machines are employed for semiconductor packaging. The dispensing accuracy is significantly affected by multiple geometric errors among the five axes. This paper proposes a vision-based measurement (VBM) system for identifying geometric errors and calibrating kinematics. The VBM system is also employed to complete the detection of the workpiece. A kinematic model of the machine was established using a local product-of-exponential formulation of screw theory. A geometric error identification algorithm was designed. Eight position-independent geometric errors (PIGEs) and position-dependent geometric errors (PDGEs) were involved. The system of overdetermined equations was solved. Combining the singular value decomposition and regularization, eight PIGEs in the A and C axes were identified. Comprehensive error measurement results verified the proposed approach. The VBM system measured a mean spatial position error of approximately 59.9 μm and a mean orientation error of about 160 arcsec for the end-effector, reflecting the geometric error level of the prototype machine. The proposed approach provides a feasible and automated calibration solution for five-axis precision dispensing machines.
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