Evidence map›Paper›PMID 41526517›Full record

ArticleNature materials2026

Wafer-scale monolayer dielectric integration on atomically thin semiconductors.

Zhenzhen Shen, Haoqi Wu, Chunsen Liu, Zizheng Liu, Yongbo Jiang, Tanjun Wang, Peng Zhou

Abstract read
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In one paragraph

Article in Nature materials, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Zhenzhen Shen *State Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics, Frontier Institute of Chip and System, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
Haoqi Wu *State Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics, Frontier Institute of Chip and System, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
Chunsen Liu *State Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics, Frontier Institute of Chip and System, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China. chunsen_liu@fudan.edu.cn.ORCID http://orcid.org/0000-0003-0842-7503
Zizheng LiuState Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics, Frontier Institute of Chip and System, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
Yongbo JiangState Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics, Frontier Institute of Chip and System, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
Tanjun WangState Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics, Frontier Institute of Chip and System, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
Peng ZhouState Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics, Frontier Institute of Chip and System, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China. pengzhou@fudan.edu.cn.ORCID http://orcid.org/0000-0002-7301-1013

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

A promising strategy for further miniaturizing metal-oxide-semiconductor field-effect transistors is the use of ultrathin two-dimensional channel materials. However, achieving robust dielectric integration with a sub-1-nm capacitance equivalent thickness (CET) remains challenging. Here we present a wafer-scale monolayer MoO

Identifiers

PMID41526517

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.