Evidence map›Paper›PMID 41486300›Full record

ReviewNano-micro letters2026

Vapor Deposition Engineering for Thin-Film Microbatteries: From Nanoscale Ionics to Interface-Integrated Architectures.

Mingming Zheng, Xinrui Xu, Xiaofei Wang, Haibin Lin, Changmin Hou, Mustafa Khan, Jinlong Zhu, Songbai Han

Abstract readReview
PubMed Full text at PMC Publisher
In one paragraph

Review in Nano-micro letters, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Mingming ZhengShenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, People's Republic of China.
Xinrui XuShenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, People's Republic of China.
Xiaofei WangShenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, People's Republic of China. wangxf6@sustech.edu.cn.
Haibin LinShenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, People's Republic of China.
Changmin HouState Key Laboratory of Inorganic Synthesis and Preparative Chemistry, Jilin University, Changchun, 130012, People's Republic of China.
Mustafa KhanShenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, People's Republic of China.
Jinlong ZhuShenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, People's Republic of China. zhujl@sustech.edu.cn.
Songbai HanShenzhen Key Laboratory of Solid State Batteries and Guangdong Provincial Key Laboratory of Energy Materials for Electric Power and Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices and Institute of Major Scientific Facilities for New Materials and Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, People's Republic of China. hansb@sustech.edu.cn.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

The rapid proliferation of microelectronics, coupled with the advent of the internet of things (IoT) era, has created an urgent demand for miniaturized, integrable, and reliable on-chip energy storage systems. All-solid-state thin-film microbatteries (TFMBs), distinguished by their intrinsic safety, compact design, and compatibility with microfabrication techniques, have emerged as promising candidates to power next-generation IoT devices. Nevertheless, in contrast to the well-established development of conventional lithium-ion batteries, the advancement of TFMBs remains at an early stage, facing persistent challenges in materials innovation, interface optimization, and scalable manufacturing. This review critically examines the pivotal role of vapor deposition technologies, including magnetron sputtering, pulsed laser deposition, thermal/electron-beam evaporation, chemical vapor deposition, and atomic layer deposition, in the fabrication and performance modulation of TFMBs. We systematically summarize recent progress in thin-film electrodes and solid-state electrolytes, with particular emphasis on how deposition parameters dictate crystallinity, lattice orientation, and ionic transport in functional layers. Furthermore, we highlight strategies for solid-solid interface engineering, three-dimensional structural design, and multifunctional integration to enhance capacity retention, cycling stability, and interfacial compatibility. Looking ahead, TFMBs are expected to evolve toward multifunctional platforms, exhibiting mechanical flexibility, optical transparency, and hybrid energy-harvesting compatibility, thereby meeting the heterogeneous energy requirements of future IoT ecosystems. Overall, this review provides a comprehensive perspective on vapor-phase-enabled TFMB technologies, delivering both theoretical insights and technological guidelines for the scalable realization of high-performance microscale power sources.

Indexed as

Interfacial engineeringMicrodevice integrationNanoscale ionic conductivityThin-film microbatteriesVapor-phase deposition techniques

Identifiers

PMID41486300
PMCPMC12765802

What OpenQuestion holds

Textmetadata
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.