Evidence map›Paper›PMID 41476059›Full record

ArticleMicrosystems & nanoengineering2026

Force balanced chip scale gravimeter achieving record low self noise of 0.1 μGal/√Hz.

Le Gao, WenJie Wu, FangZheng Li, Bingyang Cai, RunHan Xie, Zhong Zhang, LuJia Yang, Jian Zhang, MaoJun Peng, Yuan Wang and 3 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

13 authors.

Le GaoNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.ORCID http://orcid.org/0009-0004-9422-5469
WenJie WuNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China. wjwu@hust.edu.cn.ORCID http://orcid.org/0000-0001-5079-3641
FangZheng LiNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
Bingyang CaiNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
RunHan XieNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
Zhong ZhangNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
LuJia YangNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
Jian ZhangNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
MaoJun PengNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
Yuan WangInstitute of Microelectronics, State-key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.ORCID http://orcid.org/0000-0003-3814-4520
Pui-In MakInstitute of Microelectronics, State-key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Hang LiState Key Laboratory of Geodesy and Earth's Dynamics, Innovation Academy for Precision Measurement Science and Technology, Chinese Academy of Sciences, Wuhan, 430077, China.
LiangCheng TuNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.

Funding

National Natural Science Foundation of China (National Science Foundation of China) 42274230
6 · The paper itself

Abstract

Micro-electro-mechanical systems (MEMS) gravimeters are emerging as promising next-generation tools to overcome the high costs and large dimensions of conventional gravimeters. However, persistent sensitivity limitations have hindered their practical adoption. This paper presents a pioneering force-balanced MEMS gravimeter with enhanced sensitivity, achieved using quasi-zero-stiffness (QZS) springs and an arrayed capacitive displacement sensor. A novel two-step tuning method, combining saturated-ions enhanced lateral plasma thinning and thermo-mechanical coupling, precisely adjusts the QZS state and attains optimal sensitivity in displacement transducers, successively. The gravimeter achieves a resonant frequency of 0.6 Hz and a self-noise of 0.1 μGal/√Hz at 0.14 Hz, setting a new benchmark for MEMS gravimeters. To address bandwidth constraints imposed by the ultra-low resonant frequency, an electromagnetic feedback control module is introduced, expanding the bandwidth to 108 Hz. A 45-day Earth tide observation demonstrated a residual standard deviation of 2.3 μGal, reflecting exceptional long-term stability. This MEMS gravimeter breaks through sensitivity and bandwidth barriers, offering a compact, cost-effective solution for next-generation gravimetry.

Identifiers

PMID41476059
PMCPMC12756268

What OpenQuestion holds

Textmetadata
LicenceCC BY-NC-ND
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.