High-Precision Optical Angle Detection Method for Two-Dimensional MEMS Mirrors.

Longqi Ran, Yan Wang, Zhongrui Ma, Ting Li, Jiangbo He, Jiahao Wu, Wu Zhou

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Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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7 authors.

Longqi RanSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Yan WangSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Zhongrui MaSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Ting LiSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Jiangbo HeSchool of Mechanical Engineering, Xihua University, Chengdu 610039, China.

Jiahao WuHuawei Technologies Co., Ltd., Shenzhen 518129, China.

Wu ZhouSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.ORCID 0000-0001-8676-0980

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

As a core component of MEMS LiDAR, the 2D MEMS mirror, with high-precision optical angle detection, is a key technology for radar scanning and imaging. Existing piezoresistive detection schemes of mirrors suffer from high fabrication complexity, high temperature sensitivity, and a limited accuracy of only 0.08°, failing to meet the requirements for vehicular and airborne scanning applications. This study focuses on a two-dimensional electromagnetic MEMS mirror. Based on the reflection principles of geometric optics, angle detection schemes with photodiode (PD) arrays are analyzed. A novel four-quadrant optical measurement sensor featuring a 16-PD array is proposed. This design replaces conventional large-area PDs with a compact PD array, effectively mitigating nonlinearity and low accuracy issues caused by oversized PD trenches and edge dimensions. High-precision detection of the mirror's deflection angle is achieved by measuring the current variations induced by the reflected spot position on the PDs in each quadrant. The experimental results demonstrate that the 16-PD array optical angle sensor achieves an accuracy between 0.03° and 0.036° over a detection range of ±8°.

Indexed as

LiDARMEMSphotoelectric sensorvibrating mirror

Identifiers

PMID41470512

DOI10.3390/mi16121346

PMCPMC12734581

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