ArticleMicromachines2025
Femtosecond Laser Polishing of AlN Ceramics and Numerical Simulation of Ablated Morphology.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
To meet the surface polishing requirements of aluminum nitride (AlN) ceramics, this study developed a multi-objective optimization experimental model based on response surface methodology (RSM), with surface roughness as the key optimization target. A systematic series of femtosecond laser polishing experiments were conducted. Polishing effectiveness and the evolution of material properties under different process parameters were comprehensively evaluated through surface morphology characterization, microhardness testing, friction and wear experiments, and energy-dispersive X-ray spectroscopy (EDS) analysis. The experimental results indicated that the optimal combination of process parameters, as determined by RSM optimization, was identified as a laser power of 17.43 W, pulse frequency of 292.29 kHz, and scanning speed of 1004.82 mm/s. Under these parameters, femtosecond laser polishing significantly reduced the surface roughness of the AlN ceramic, with the initial Ra value decreasing from 2.513 μm to 0.538 μm, a reduction of 78.57%. Compared to CO
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