Evidence map›Paper›PMID 41470388›Full record

ArticleMaterials (Basel, Switzerland)2025

Comprehensive Structural and Interfacial Characterization of Laser-Sliced SiC Wafers.

Hong Chen, Seul Lee, Minseung Kang, Hye Seon Youn, Seongwon Go, Eunsook Kang, Chae-Ryong Cho

Abstract read
In one paragraph

Article in Materials (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Hong ChenDepartment of Nano Fusion Technology, Pusan National University, Busan 46241, Republic of Korea.
Seul LeeDepartment of Nano Fusion Technology, Pusan National University, Busan 46241, Republic of Korea.
Minseung KangDepartment of Nano Fusion Technology, Pusan National University, Busan 46241, Republic of Korea.
Hye Seon YounDepartment of Nano Fusion Technology, Pusan National University, Busan 46241, Republic of Korea.
Seongwon GoDepartment of Nano Fusion Technology, Pusan National University, Busan 46241, Republic of Korea.
Eunsook KangR&D Center, Unis Co., Ltd., 1394 Nakdong-daero, Sasang-gu, Busan 46907, Republic of Korea.
Chae-Ryong ChoDepartment of Nano Fusion Technology, Pusan National University, Busan 46241, Republic of Korea.ORCID 0000-0002-6685-4012

Funding

Regional Innovation System & Education (RISE), Ministry of Education (MOE), Busan Metropolitan City, Republic of Korea 2025-RISE-02-004-12470001-01
6 · The paper itself

Abstract

Laser slicing has emerged as a promising low-kerf and low-damage technique for SiC wafer fabrication; however, its effects on the crystal integrity, near-surface modification, and charge-transport properties require further clarification. Here, a heavily N-doped 4° off-axis 4H-SiC wafer was sliced using an ultraviolet (UV) picosecond laser, and both laser-irradiated and laser-sliced surfaces were comprehensively characterized. X-ray diffraction and pole figure measurements confirmed that the 4H stacking sequence and macroscopic crystal orientation were preserved after slicing. Raman spectroscopy, including analysis of the folded transverse-optical and longitudinal-optical phonon-plasmon coupled modes, enabled dielectric function fitting and determination of the plasmon frequency, yielding a free-carrier concentration of ~3.1 × 10

Indexed as

ARXPScrystal integritylaser slicingSiC waferSIMSsurface damageTEM

Identifiers

PMID41470388
PMCPMC12734574

What OpenQuestion holds

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LicenceCC BY
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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.