ArticleNano letters2026
Nanoelectromechanical Spectral Control of Silicon Bowtie Nanocavities for Quantum Light Sources.
Article in Nano letters, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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7 authors.
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Abstract
We present the design, fabrication, and characterization of tunable waveguide-coupled silicon bowtie cavities with strong spatial electromagnetic field confinement. We use nanoelectromechanical in-plane actuation for the tuning, as this combines cryocompatibility with ultralow power consumption. Our device leverages a mode volume below 0.2 cubic wavelengths in the material to reach theoretical Purcell factors above 6,500 and waveguide-coupling efficiency above 30% across the full experimentally measured spectral-tuning range of 11 nm. Our spectral measurements demonstrate reversible tuning of bowtie cavities, and we directly show the in-plane actuation using in situ characterization in a scanning electron microscope. Our results constitute the first demonstration of a low-loss tunable bowtie nanocavity with strong light confinement. This solves a key issue for experiments on strong light-matter interactions for cavity quantum electrodynamics and scalable photonic quantum technologies.
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