ArticleSmall (Weinheim an der Bergstrasse, Germany)2026
Atomic Layer Deposition of Aluminum Phosphorus Oxynitride and Its Application as a Passivation Layer on Aluminum Metal Anode.
Article in Small (Weinheim an der Bergstrasse, Germany), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
1 citing paper in PubMed.
- Atomic Layer Deposition of Aluminum Phosphorus Oxynitride and Its Application as a Passivation Layer on Aluminum Metal Anode.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
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Authors and funding
5 authors.
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Abstract
Aqueous aluminum (Al) batteries are an attractive energy storage technology due to the high theoretical capacity of Al, low reduction potential, low cost, and environmental friendliness. However, the practical application of aqueous Al batteries has been hindered by aggressive parasitic reactions, such as Al corrosion, at the Al and aqueous electrolyte interface. For the first time, this work developed aluminum phosphorus oxynitride (AlPON) by plasma-enhanced atomic layer deposition (PEALD) and applied it to suppress side reactions at the Al and electrolyte interface. The AlPON is obtained by PEALD in a temperature range of 100-180 °C using trimethylaluminum, water, tris(dimethylamino)phosphine, and plasma oxygen as precursors. It is noteworthy that the doubly and triply valent N environment (P-N = P and P-
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