ArticleSensors (Basel, Switzerland)2025
Multiphysics Optical-Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber.
Article in Sensors (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
3 citing papers in PubMed.
- TiSiNanomaterials (Basel, Switzerland) · 2026Article
- Ultra-Broadband Metasurface Absorber Enabled by a Central-Bar-Coupled Split-Disk Dimer.Biosensors · 2026Article
- Flatland Metasurfaces for Optical Gas Sensing.Sensors (Basel, Switzerland) · 2026Review
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Authors and funding
2 authors.
Funding
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Abstract
Infrared (IR) thermal sensors on CMOS-SOI-MEMS platforms enable scalable, low-cost thermal imaging but require optimized optical, thermal, and mechanical performance. This paper presents a multiphysics modeling framework to study the integration of Metasurface absorbers into a Thermal CMOS-SOI-MEMS IR sensor. Using finite-difference time-domain (FDTD) simulations, we demonstrate near-unity absorption at targeted wavelengths (e.g., 4.26 µm for CO
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Registered trials
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