Evidence map›Paper›PMID 41305020›Full record

ReviewSensors (Basel, Switzerland)2025

A Comprehensive Review of Optical Metrology and Perception Technologies.

Shuonan Shan, Fangyuan Zhao, Zinan Li, Linbin Luo, Xinghui Li

Abstract readReview
In one paragraph

Review in Sensors (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Review
  2. Article
  3. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors.

Shuonan ShanTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Fangyuan ZhaoTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Zinan LiTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Linbin LuoTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Xinghui LiTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.

Funding

National Natural Science Foundation of China 62275142Shenzhen Science and Technology Program JCYJ20241202125343058Shenzhen Stable Supporting Program WDZC20231124201906001
6 · The paper itself

Abstract

Optical metrology and perception technologies employ light as an information carrier to enable non-contact, high-precision measurement of geometry, dynamics, and material properties. They are widely deployed in industrial and consumer domains, from nanoscale defect inspection in semiconductor manufacturing to environmental perception in autonomous driving and spatial tracking in AR/VR. However, existing reviews often treat individual modalities-such as interferometry, imaging, or spectroscopy-in isolation, overlooking the increasing cross-domain integration in emerging systems. This review proposes a hierarchical taxonomy encompassing four core systems: interferometry, imaging, spectroscopy, and hybrid/advanced methods. It introduces a "theory-application-innovation" framework to unify fundamental principles, application scenarios, and evolutionary trends, revealing synergies across modalities. By mapping technological progress to industrial and societal needs, including AI-driven optimization and quantum-enhanced sensing, this work provides a structured, evolving knowledge base. The framework supports both cross-disciplinary understanding and strategic decision-making, offering researchers and engineers a consolidated reference for navigating the rapidly expanding frontiers of optical metrology and perception.

Indexed as

cross-domain integrationhybrid optical systemsimaginginterferometrymultimodal sensingoptical metrologyperception technologyprecision measurementspectroscopy

Identifiers

PMID41305020
PMCPMC12656061

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.