ArticlePolymers2025
Degradation Mechanism of Perfluoroelastomer (FFKM) in the Acidic SC2 Solution of Semiconductor Radio Corporation of America (RCA) Cleaning.
Article in Polymers, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
The degradation behavior and mechanism of perfluoroelastomer (FFKM) in the acidic Standard Clean 2 (SC2) solutions were studied to facilitate their application in semiconductor Radio Corporation of America (RCA) cleaning processes. The results indicate significant degradation of the mechanical properties of FFKM in the SC2 solution, characterized by surface pitting and particle formation, accompanied by progressive destruction of the cross-linked network. FTIR and XPS analyses revealed that degradation primarily occurs in the Trialkyl isocyanurate (TAIC) cross structure, while the main chain and side groups remain stable. HCl-induced acid hydrolysis and H
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