Direct Fabrication of Inclined-Sidewall Microgrooves with Shaped Flat-Top Beams.

Jianyong Mao, Wenqiang Chen, Kai Chen, Xun Li, Yu Tan, Ming Li, Lei Zhang

Abstract read

In one paragraph

Article in Materials (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

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5 · Who and what money

Authors and funding

7 authors.

Jianyong MaoKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.ORCID 0000-0001-9488-5724

Wenqiang ChenKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Kai ChenState Key Laboratory of Ultrafast Optical Science and Technology, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an 710119, China.

Xun LiState Key Laboratory of Ultrafast Optical Science and Technology, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an 710119, China.

Yu TanState Key Laboratory of Ultrafast Optical Science and Technology, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an 710119, China.

Ming LiSchool of Mechanical Engineering, Shandong University, Jinan 250061, China.

Lei ZhangKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.ORCID 0000-0002-5113-1786

Funding

Defense Industrial Technology Development Program JCKY2023130C001National Key Research and Development Program of China 2022YFB4601700National Natural Science Foundation of China 62305312

6 · The paper itself

Abstract

Microgrooves have demonstrated significant application value across various fields. As a key processing technology, femtosecond laser processing exhibits notable advantages due to its high precision and minimal thermal impact. This study presents a method for fabricating microgrooves with inclined sidewalls using shaped flat-top laser beams. By controlling both the beam shape and scanning parameters, microgrooves with tailored sidewall morphology are produced in a single scan on silicon wafers. The optical performance of the fabricated structures is further evaluated through blazed grating prototypes. The experimental results aligned well with theoretical predictions. These results confirm that the proposed approach provides a viable technical pathway for efficient and high-quality fabrication of functional microstructures on comparable materials.

Indexed as

beam-controlled morphologydirect laser writingflat-top beammicrogroovesingle-pass 3D ablation

Identifiers

PMID41304048

DOI10.3390/ma18225204

PMCPMC12654829

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.