Structural Optimization and Simulation of Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers.

Ultrasound transducers are fundamental components in medical imaging systems, impacting resolution, sensitivity, and penetration depth. A key challenge in designing high-performance ultrasound transducers is balancing bandwidth and sensitivity. This study focuses on optimizing the backing layer of a dual-frequency piezoelectric micromachined ultrasound transducer (PMUT) using polydimethylsiloxane (PDMS). COMSOL multi-physics version 6.2 finite element simulations and equivalent circuit modeling were employed to investigate the effects of PDMS backing layer thickness and geometry on frequency response characteristics, impedance matching, and acoustic sensitivity. The optimized PMUT structure demonstrated a significant enhancement in bandwidth, with the -6 dB bandwidth increasing to 92% at both 2.3 MHz and 6.8 MHz frequencies. The PDMS backing layer improved the matching of low- and high-frequency signals, enabling high sensitivity and reduced interface reflection losses. The incorporation of PDMS as the backing layer successfully expands the operational bandwidth of dual-frequency PMUTs while maintaining high sensitivity, offering promising potential for high-performance ultrasound imaging, particularly in medical applications requiring both deep penetration and high-resolution imaging.