ArticleMicromachines2025
Design, Fabrication, and Characterization of a Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Cantilever Beam-like Structure with Enhanced SPL for Air Detection Applications.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
3 citing papers in PubMed.
- Beam Drift Mitigation and Wide-Range Measurement in a Miniaturized Ultrasonic Gas Flowmeter.Micromachines · 2026Article
- Structure Design Optimization of a Differential Capacitive MEMS Accelerometer Based on a Multi-Objective Elitist Genetic Algorithm.Micromachines · 2026Article
- Active-Passive Vibration Control of Cantilever Beam Based on Magnetic Spring with Negative Stiffness and Piezoelectric Actuator.Micromachines · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
3 authors.
Funding
Abstract
Air-coupled ultrasonic detection demands high transmission performance from piezoelectric micromachined ultrasonic transducers (PMUTs). However, existing microelectromechanical system (MEMS)-based PMUTs deliver limited output, which compromises measurement accuracy and constrains further development. This work proposes a novel PMUT design with a cantilevered, boundary-suspended diaphragm that relieves residual stress, relaxes edge constraints, increases the mechanical degrees of freedom, and enables larger vibration amplitudes. Additionally, this work develops an accurate air-coupling model to predict device performance and a streamlined micro-nanofabrication process for device realization. Experimental results show that under a 1 Vpp (-5 Voffset) drive, the device achieves a peak acoustic pressure of 4.004 Pa at 69.3 kHz, measured at 10 cm distance in air, corresponding to a maximum sound pressure level of 106.02 dB (re 2 × 10
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.