Theoretical and Experimental Investigation on the Nanostructures Evolution on Pre-Patterned Fused Silica by Focused Ion Beam.

Jianwei Ji, Yangsen Luo, Shaosen Liang, Jiyin Zhang, Kai Liu

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Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

Authors and funding

5 authors.

Jianwei JiCollege of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054, China.

Yangsen LuoCollege of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054, China.

Shaosen LiangCollege of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054, China.

Jiyin ZhangCollege of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054, China.

Kai LiuDepartment of Industrial Engineering, University of Padua, 35131 Padova, Italy.ORCID 0000-0002-3423-787X

Funding

China Postdoctoral Science Foundation funded project 2024M753509the Science and Technology Research Program of Chongqing Municipal Education Commission KJQN202301137

6 · The paper itself

Abstract

This paper investigates the laws governing the evolution of nanostructures on pre-patterned fused silica surfaces by energetic ion erosion. First, regular nanostructures are fabricated with the Focused Ion Beam (FIB) operating at optimized processing parameters. Then, as a function of the different ion fluences, the surface morphology evolution is studied on a surface with newly formed nanostructures. An experimental phenomenon of inter-transformation between nano-ripples and random dot-like structures is observed. In addition, the principles of the development of the nanostructures are analyzed theoretically. The simulation results fit well with the experiments. This work deeply studies the influence of the initial surface micro-morphology on the evolution of nanostructures, and is of great significance for the control of surface nanostructures generated by energetic ion sputtering.

Indexed as

fused silicaion sputteringpre-patterned surfaceself-organized nanostructures

Identifiers

PMID41302761

DOI10.3390/mi16111243

PMCPMC12654035

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