Evidence map›Paper›PMID 41302736›Full record

ArticleMicromachines2025

Fabrication Process Research for Silicon-Waveguide-Integrated Cavity Optomechanical Devices Using Magnesium Fluoride Protection.

Chengwei Xian, Pengju Kuang, Ning Fu, Zhe Li, Changsong Wang, Yi Zhang, Rudi Zhou, Guangjun Wen, Boyu Fan, Yongjun Huang

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Chengwei XianSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.
Pengju KuangSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.
Ning FuSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.
Zhe LiSchool of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.ORCID 0009-0002-4481-4922
Changsong WangSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.
Yi ZhangSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.
Rudi ZhouSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.
Guangjun WenSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.
Boyu FanSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.
Yongjun HuangSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.ORCID 0000-0002-5069-6451

Funding

the Innovation Ability Construction Project for Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT 2303-510109-04-03-318020the National Key R&D Program 2022YFA1405900the National Natural Science Foundation of China 62371106, U2230206, U2441217, and 62204264the Sichuan Provincial Science and Technology Planning Program 2023YFG0040, 2024ZYD0156
6 · The paper itself

Abstract

As an emerging platform for high-precision sensing, integrated silicon-waveguide-based cavity optomechanical devices face a critical fabrication challenge in the co-fabrication of silicon-on-insulator (SOI) micromechanical structures and optical waveguides: the silicon oxide (SiO

Indexed as

hydrofluoric acid etchingintegrated silicon waveguidemagnesium fluorideselective protectionSOI micromachining

Identifiers

PMID41302736
PMCPMC12654534

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.