Evidence map›Paper›PMID 41228831›Full record

ArticleSensors (Basel, Switzerland)2025

Advanced BCl

Badriyah Alhalaili

Abstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

1 author.

Badriyah AlhalailiNanotechnology and Advanced Materials Program, Energy and Building Research Center, Kuwait Institute for Scientific Research, Safat 13109, Kuwait.ORCID 0000-0002-6492-4435

Funding

Kuwait Institute for Scientific Research EA091K
6 · The paper itself

Abstract

Gallium oxide-based devices are critical in various applications, including industrial safety, the gas and petroleum sectors, and research environments. However, the deep etching process has not been thoroughly explored. Key parameters such as etching rate, selectivity, uniformity, isotropic/anisotropic behavior, and surface properties all influence the effectiveness of the etching process and its reproducibility. This research was motivated by the need for efficient fabrication processes, particularly in applications where sensors must operate in harsh environments, due to their instead of owning to low leakage current density of their power devices. In this study, we studied a deep etching technique for Ga

Indexed as

BCl3dry etchingetching rateGa2O3

Identifiers

PMID41228831
PMCPMC12609466

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.