Evidence map›Paper›PMID 41227849›Full record

ArticleMaterials (Basel, Switzerland)2025

Experimental Study on the Role of Bond Elasticity and Wafer Toughness in Back Grinding of Single-Crystal Wafers.

Joong-Cheul Yun, Dae-Soon Lim

Abstract read
In one paragraph

Article in Materials (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

2 authors.

Joong-Cheul YunDepartment of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea.ORCID 0009-0006-5765-6600
Dae-Soon LimDepartment of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea.

Funding

Ministry of Trade, Industry and Energy RS-2024-00455529
6 · The paper itself

Abstract

Grinding semiconductor wafers with high hardness, such as SiC, remains a significant challenge due to the need to maximize material removal rates while minimizing subsurface damage. In the back-grinding process, two key parameters-the elastic modulus (Eb) of the grinding wheel bond and the fracture toughness (K

Indexed as

bond elastic modulusdiamond protrusionfracture toughnessgrindingsemiconductor wafer

Identifiers

PMID41227849
PMCPMC12609232

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.