Evidence map›Paper›PMID 41201006›Full record

ArticleAdvanced science (Weinheim, Baden-Wurttemberg, Germany)2026

In Situ GISAXS Study of IZO Deposition via Magnetron Sputtering for Optoelectronic Devices: Film Growth and Ion Bombardment-Induced Degradation Dynamics.

Huaying Zhong, Marlene Sophie Härtel, Wei Chen, Lukas V Spanier, Shanshan Yin, Jiahuan Zhang, Bertwin Bilgrim Otto Seibertz, Bernd Szyszka, Steve Albrecht, Matthias Schwartzkopf and 2 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Advanced science (Weinheim, Baden-Wurttemberg, Germany), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Huaying ZhongTechnical University of Munich, TUM School of Natural Sciences, Department of Physics, Chair for Functional Materials, James-Franck-Str. 1, 85748, Garching, Germany.
Marlene Sophie HärtelHelmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109, Berlin, Germany.
Wei ChenCollege of Engineering Physics, and Center for Intense Laser Application Technology, Shenzhen Technology University, Shenzhen, 518118, China.
Lukas V SpanierTechnical University of Munich, TUM School of Natural Sciences, Department of Physics, Chair for Functional Materials, James-Franck-Str. 1, 85748, Garching, Germany.
Shanshan YinSchool of Mathematics and Physics, and Jiangsu Key Laboratory of Clean Energy Storage and Conversion, Jiangsu University of Technology, Changzhou, 213001, China.
Jiahuan ZhangHelmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109, Berlin, Germany.
Bertwin Bilgrim Otto SeibertzTechnische Universität Berlin, Straße des 17, 10623, Berlin, Germany.
Bernd SzyszkaTechnische Universität Berlin, Straße des 17, 10623, Berlin, Germany.
Steve AlbrechtHelmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109, Berlin, Germany.
Matthias SchwartzkopfDeutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607, Hamburg, Germany.
Stephan V RothDeutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607, Hamburg, Germany.
Peter Müller-BuschbaumTechnical University of Munich, TUM School of Natural Sciences, Department of Physics, Chair for Functional Materials, James-Franck-Str. 1, 85748, Garching, Germany.ORCID https://orcid.org/0000-0002-9566-6088

Funding

Bayerisches Staatsministerium für Wissenschaft und Kunst SolTechCenter for NanoScience (CeNS)China Scholarship Council (CSC)Deutsche Forschungsgemeinschaft EXC2089/1-390776260Deutsche Forschungsgemeinschaft IRTG2022Deutsche Forschungsgemeinschaft MU1487/39-1Deutsche Forschungsgemeinschaft RO4638/3-1
6 · The paper itself

Abstract

Magnetron sputtering is a well-established fabrication technique in industry for the deposition of transparent conductive oxides toward optoelectronic device applications. However, the bombardment with highly energetic O

Indexed as

degradation dynamicsgrowth dynamicsion bombardmentIZOsputter deposition

Identifiers

PMID41201006
PMCPMC12850019

What OpenQuestion holds

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Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.