ArticleScientific reports2025
Air-coupled piezoelectric micromachined ultrasonic transducer array based on low-cost and large remnant polarization PZT thin film.
Article in Scientific reports, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
1 citing paper in PubMed.
- Air-Coupled Ultrasound Systems for Biomedical Applications: Advances in Sensors, Electronic Interfaces and Signal Processing Strategies.Sensors (Basel, Switzerland) · 2026Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
10 authors.
Funding
Abstract
Due to the development of semiconductor technology, control and driving circuits for large phased arrays have become cheaper and more compact, enabling air-coupled ultrasonic transducer arrays to be applied in areas such as ultrasonic haptic feedback and acoustic levitation. However, current air-coupled ultrasonic transducers are quite bulky, which prevents the commercialization of these applications. Hence, piezoelectric micromachining ultrasonic transducers (pMUT) have been proposed to replace conventional ultrasound transducers. Currently, PZT, or lead zirconate titanate, thin film is the most reliable and, consequently, most popular piezoelectric layer for pMUT, but existing PZT fabrication methods are too expensive or require rare metals. To counter this problem, this study proposed a cost-effective and reliable PZT thin film fabrication method. By depositing a commercial sol-gel solution as a seed layer followed by radio frequency sputtering, a PZT thin film with remnant polarization of 113.35 µC/cm
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.