Thermal Sensitivity of a Microoptoelectromechanical Evanescent-Coupling-Based Accelerometer.

This treatise studies the thermal sensitivity of the mechanical and optical transmission coefficients of a microoptoelectromechanical (MOEM) accelerometer based on evanescent coupling in a temperature range from minus 40 to plus 125 °C. Two types of optical measuring transducers are considered: based on a directional coupler and a resonator. This analysis covers the optical and mechanical components of the thermal sensitivity of the transmission coefficient. In terms of the mechanical part, the temperature effect induces changes to the linear dimensions of the structure and material characteristics and causes internal mechanical stresses as well. The temperature effect on the optical system of the accelerometer is conditioned by the thermo-optic effect of the materials the optical waveguides are made of. This study includes experiments on the refraction index dependence on the temperature of the optical films that compose the optical system of the MOEM accelerometer. The experiment shows that the refraction index of the films grows with temperature and amounts to 0.12642 ppm/°C for silicon nitride on the SiO