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ArticleMicromachines2025

Analysis of Key Factors Affecting the Sensitivity of Dual-Backplate Capacitive MEMS Microphones.

Chengpu Sun et al.PubMed ↗Full text ↗Publisher ↗

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1 paper cites it

2025
2026
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Full record →Abstract, authors, funding and every citing paper · PMID 41156401