Evidence map›Paper›PMID 41156398›Full record

ArticleMicromachines2025

Thermal Gas Flow Sensor Using SiGe HBT Oscillators Based on GaN/Si SAW Resonators.

Wenpu Cui, Jie Cui, Wenchao Zhang, Guofang Yu, Di Zhao, Jingqing Du, Zhen Li, Jun Fu, Tianling Ren

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In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0citing papers in PubMed
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1 · What the graph read from it

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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

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0 citing papers in PubMed.

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4 · The record

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5 · Who and what money

Authors and funding

9 authors.

Wenpu CuiSchool of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.ORCID 0009-0001-9750-6336
Jie CuiSchool of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.
Wenchao ZhangSchool of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.
Guofang YuSchool of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.
Di ZhaoBeijing Sevenstar Flow Co., Ltd., Beijing 100176, China.
Jingqing DuBeijing Sevenstar Flow Co., Ltd., Beijing 100176, China.
Zhen LiSchool of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.
Jun FuSchool of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.
Tianling RenSchool of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

This paper presents a thermal gas flow sensing system, from surface acoustic wave (SAW) temperature sensor to oscillation circuit and multi-module miniaturization integration. A single-port GaN/Si SAW resonator with single resonant mode and excellent characteristics was fabricated. Combined with an in-house-developed SiGe HBT, a temperature-sensitive high-frequency oscillator was constructed. Under constant temperature control, system-level flow measurement was achieved through dual-oscillation configuration and modular integration. The fabricated SAW device shows a temperature coefficient of frequency (TCF) -28.29 ppm/K and temperature linearity 0.998. The oscillator operates at 1.91 GHz with phase noise of -97.72/-118.62 dBc/Hz at 10/100 kHz offsets. The system demonstrates excellent dynamic response and repeatability, directly measuring 0-50 sccm flows. For higher flows (>50 sccm), a shunt technique extends the test range based on the 0-10 sccm linear region, where response time is <1 s with error <0.9%. Non-contact operation ensures high stability and long lifespan. The sensor shows outstanding performance and broad application prospects in flow measurement.

Indexed as

GaNgas flow sensorSAWSiGe HBTthermal

Identifiers

PMID41156398
PMCPMC12566365

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.