A Novel Asymmetric High-Performance MEMS Pendulum Capacitive Accelerometer.

Guangxian Dong, Jia Jiang, Weixin Wu, Zhentao Zhang, Jin Cao, Zhang Gao, Haitao Liu

Abstract read

In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Guangxian DongChongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.

Jia Jiang24th Research Institute of China Electronics Technology Group Corporation, Chongqing 401332, China.

Weixin WuChongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.

Zhentao ZhangChongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.

Jin CaoChongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.

Zhang GaoChongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.

Haitao LiuKey Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China.

Funding

Special Project for Performance Incentive Guidance of Scientific Research Institutions in Chongqing CSTB2024JXJL-YFX0054

6 · The paper itself

Abstract

In this study, we propose a novel asymmetric high-performance MEMS pendulum accelerometer comprising a sensitive structure and an interface circuit. The sensitive structure, designed with asymmetric mass blocks, significantly improves both sensitivity and structural stability. The sensor is fabricated using a double-side polished (100) N-type silicon wafer and its structure is ultimately realized through ICP (Inductively Coupled Plasma) etching. We also develop and fabricate the corresponding interface circuit. The accelerometer is evaluated through a static field roll-over test, demonstrating excellent performance with a sensitivity of 1.247 V/g and a nonlinearity of 0.8% within the measurement range of -2 g to 2 g.

Indexed as

asymmetriccapacitive accelerometerinterface circuitsMEMS (microelectromechanical system)pendulum

Identifiers

PMID41156369

DOI10.3390/mi16101122

PMCPMC12566559

What OpenQuestion holds

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LicenceCC BY

Read underepoch 390

Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.