ArticleMicromachines2025
Integrated Control Strategies for a Precision Long-Travel Stage: Applications in Micro-Lens Fabrication.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
2 citing papers in PubMed.
- Multi-Layer Control with Disturbance Observers for a Long-Travel Dual-Stage Precision Positioning Platform.Micromachines · 2026Article
- Torque Control for a Novel Non-Contact Piezoelectric Motor Modulated by Electromagnetic Force.Micromachines · 2026Article
Corrections and comments
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Authors and funding
6 authors.
Funding
Abstract
This paper develops multiple control strategies for a precision long-travel stage, which comprises motor and piezoelectric transducer (PZT) stages. First, the PZT stage is equipped with control switching and model estimation mechanisms to achieve nm-level precision within 100 μm distances. The control switching mechanism selects the optimal control sequences by predicting system responses, while the model estimation algorithm updates the system model to improve the prediction accuracy. Second, the motor stage is equipped with gain-scheduling and feedforward control mechanisms to achieve a maximum displacement of 100 mm with a resolution of 0.1 μm. The gain scheduling control modifies the control gain in accordance with tracking errors, while the feedforward control can mitigate phase lags. We integrate the stages to achieve nm-level precision over long travels and conduct simulations and experiments to show the advantages of the control mechanisms. Finally, we apply the long-travel precision stage to fabricate micro-lenses using two-photon polymerization and evaluate the fabricated micro-lenses' optical characteristics to illustrate the merits of the control strategies.
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Registered trials
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