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ReviewMicromachines2025

Photoelectrochemical Oxidation and Etching Methods Used in Fabrication of GaN-Based Metal-Oxide-Semiconductor High-Electron Mobility Transistors and Integrated Circuits: A Review.

Ching-Ting Lee et al.PubMed ↗Full text ↗Publisher ↗

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3 papers cite it

2025
2026
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Full record →Abstract, authors, funding and every citing paper · PMID 41156324