ArticleMicrosystems & nanoengineering2025
III-Nitride MEMS drum resonators on flexible metal substrates.
A Kassem et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicrosystems & nanoengineering2025
A Kassem et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.