A Review: Grating Encoder Technologies for Multi-Degree-of-Freedom Spatial Measurement.

In advanced manufacturing, nanotechnology, and aerospace fields, the demand for precision is increasing. Driven by this demand, multi-degree-of-freedom grating encoders have become particularly crucial in high-precision displacement and angle measurement. Over the years, these encoders have evolved from one-dimensional systems to complex multi-degree-of-freedom measurement solutions that can achieve real-time synchronization. There can also be high-resolution feedback. Its structure is relatively compact, the signal output is also very stable, and the integration degree is high. This gives it a significant advantage in complex measurement tasks. Recently, there have been new developments. The functions of grating encoders in terms of principle, system architecture, error modeling, and signal processing strategies have all been expanded. For instance, accuracy can be improved by integrating multiple reading-heads, while innovative strategies such as error decoupling and robustness enhancement have further advanced system performance. This article will focus on the development of two-dimensional, three-dimensional and multi-degree-of-freedom grating encoders, exploring how the measurement degrees of freedom have evolved, and emphasizing key developments in spatial decoupling, error compensation and system integration. At the same time, it will also discuss some challenges, such as error coupling, system stability and intelligent algorithms for integrating real-time error correction. The future of grating encoders holds great potential. Their applications in precision control, semiconductor calibration, calibration systems, and next-generation intelligent manufacturing technologies can bring promising progress to both industrial and scientific fields.