Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression.

Electromagnetic micro-electro-mechanical system (MEMS) micromirrors are widely used in optical scanning systems but often encounter mechanical crosstalk due to the use of shared drive coils. This phenomenon leads to parasitic motion along the slow axis during fast-axis operation, resulting in undesirable elliptical scanning patterns that degrade image quality. To tackle this issue, a hybrid actuation scheme is proposed in which a piezoelectric actuator drives the fast axis through an S-shaped spring structure, achieving a resonance frequency of 792 Hz, while the slow axis is independently driven by an electromagnetic actuator operating in quasi-static mode. Finite element simulations and experimental measurements validate that the proposed decoupled design significantly suppresses mechanical crosstalk. When the fast axis is driven to a 40° optical scan angle, the hybrid system reduces the parasitic slow-axis deflection (typically around 1.43°) to a negligible level, thereby producing a clean single-line scan. The piezoelectric fast axis exhibits a quality factor of Q = 110, while the electromagnetic slow axis achieves a linear 20° deflection at 20 Hz. This hybrid design facilitates a distortion-free field of view measuring 40° × 20° with uniform line spacing, presenting a straightforward and effective solution for high-precision scanning applications such as LiDAR (Light Detection and Ranging) and structured light projection.