ArticleMicromachines2025
Optical Sensor for Scanning Angle of Micromirror with Improved 2D Calibration Method.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
1 citing paper in PubMed.
- High-Precision Optical Angle Detection Method for Two-Dimensional MEMS Mirrors.Micromachines · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
6 authors.
Funding
Abstract
The optical angle sensor demonstrates considerable potential to supersede the piezoresistive sensor as the preferred angle detection mechanism for micromirrors, primarily due to its reduced vulnerability to temperature fluctuations. However, this sensor is susceptible to interference from rotations about non-detectable axes and exhibits inadequate linearity. To mitigate these challenges, this paper introduces a sub-region calibration method. A mapping surface was created to link the output signal offsets of two axes with their input angles, allowing the effects of non-measured axes to be treated as variables. To simplify the mathematical model of this mapping surface, it was divided into an n-by-n grid of small areas. Each area uses bilinear interpolation to calculate the corresponding angle from the output values. To quickly locate which grid area a sensor output belongs to, the entire mapping surface was scaled to a range from 0 to n. Sensor outputs are then assigned to specific grid areas using the floor function. For validation, an optical sensor and a 2D rotating stage were built for calibration tests. Experimental results show that this calibration method keeps measurement errors below 0.01° within a ±8° operating range of the sensor.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.