Evidence map›Paper›PMID 40995519›Full record

ReviewNanophotonics (Berlin, Germany)2025

Fabrication of functional micro-nano structures using phase holographically modulated femtosecond laser technology: a review.

Yang Liu, Jie Wang, Zhipeng Wang, Ji Huang, Xuejiao Wang, Jingjing Zhang, Zijie Dai, Yunxia Ye

Abstract readReview
In one paragraph

Review in Nanophotonics (Berlin, Germany), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Yang LiuSchool of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China.ORCID https://orcid.org/0009-0006-8460-454X
Jie WangSchool of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China.
Zhipeng WangLaser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, China.
Ji HuangNational Institute of Metrology, Beijing, 100029, China.ORCID https://orcid.org/0009-0009-7505-981X
Xuejiao WangSchool of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China.
Jingjing ZhangSchool of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China.
Zijie DaiSchool of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China.
Yunxia YeSchool of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Micro-nano fabrication technology is critical to high-end fabrication, bridging the gap between microscopic and macroscopic scales. Femtosecond laser fabrication, owing to its ultrafast nonlinear effects and three-dimensional direct writing capabilities, has demonstrated unique advantages in the fabrication of functional micro-nano structures. Phase holographically modulated femtosecond laser technology, as a representative of spatial optical field modulation, modulates the phase of the incident laser field to flexibly transform a single focal point into various spatial optical fields, including multifocal arrays, patterned optical fields, and three-dimensional optical fields, according to specific fabrication requirements. This technology not only improves fabrication precision and efficiency but also provides greater flexibility in femtosecond laser fabrication. This review systematically summarizes recent technological advances, focusing on four aspects: algorithms for generating phase holograms, exceeding the diffraction limit to improve fabrication resolution, optimizing fabrication quality, and improving fabrication efficiency. It aims to provide theoretical foundations and technical references to support the practical application of modulated femtosecond laser technology in the fabrication of functional micro-nano structures.

Indexed as

femtosecond laserfunctional micro–nano structurelaser fabricationphase hologramspatial modulation

Identifiers

PMID40995519
PMCPMC12455291

What OpenQuestion holds

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LicenceCC BY
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.