ArticleOptics letters2025
Compact DUV reflective Fourier ptychographic microscopy for high-throughput surface measurements.
Article in Optics letters, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
High-throughput surface measurements and inspection are crucial for a wide range of applications, from reflective optical components to very large-scale integrated (VLSI) circuits. Reflective Fourier ptychographic microscopy (RFPM) has been previously reported as a solution for imaging reflective surfaces at high resolution. Prior approaches have used epi-illumination for bright-field and either a ring array or parabolic mirror for dark-field illumination, which can be bulky and require demanding calibration compared to standard transmission FPM setups. In this work, we present a novel, to the best of our knowledge, deep ultraviolet (DUV) RFPM method that utilizes a single LED matrix as the illumination source. The system achieves a simpler and more compact reflective FPM setup, enabling a 1.6 mm field of view, 690 nm spatial resolution, and nanometer-scale height profiling using a 5×, 0.12 NA DUV objective lens. We demonstrate the DUV RFPM experimental setup and present measurement results on wafer standards and a machined concave mirror surface.
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