Evidence map›Paper›PMID 40940593›Full record

ReviewAdvanced science (Weinheim, Baden-Wurttemberg, Germany)2025

Rational Design and Fabrication of MEMS Gas Sensors With Long-Term Stability: A Comprehensive Review.

Chao Zhang, Tianyi Wang, Guozhu Zhang, Rui Gao, Chengze Gao, Zeyu Wang, Fuzhen Xuan

Abstract readReview
In one paragraph

Review in Advanced science (Weinheim, Baden-Wurttemberg, Germany), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.

0numbers the graph read from it
0cells of the map it votes in
7citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

7 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
  4. Article
  5. Article
  6. Review
  7. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Chao ZhangShanghai Key Laboratory of Intelligent Sensing and Detection Technology, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, P. R. China.
Tianyi WangShanghai Key Laboratory of Intelligent Sensing and Detection Technology, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, P. R. China.
Guozhu ZhangShanghai Key Laboratory of Intelligent Sensing and Detection Technology, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, P. R. China.ORCID https://orcid.org/0000-0002-8860-2393
Rui GaoShanghai Key Laboratory of Intelligent Sensing and Detection Technology, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, P. R. China.
Chengze GaoShanghai Key Laboratory of Intelligent Sensing and Detection Technology, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, P. R. China.
Zeyu WangShanghai Key Laboratory of Intelligent Sensing and Detection Technology, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, P. R. China.
Fuzhen XuanShanghai Key Laboratory of Intelligent Sensing and Detection Technology, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, P. R. China.

Funding

Innovative Research Group Project of the National Natural Science Foundation of China 52321002National Major Scientific Instruments and Equipments Development Project of National Natural Science Foundation of China 32327801National Natural Science Foundation of China 52375148Natural Science Foundation of Shanghai 23ZR1417000
6 · The paper itself

Abstract

With the growing demand for chemical information collection from the environment, miniaturized size and high sensitivity labeled microelectromechanical systems (MEMS) gas molecular sensing devices have emerged as a promising element in the development of machine olfactory. However, prolonged exposure to gas analytes often induces slow chemical transformations on the sensing film surface, leading to reduced chemical activity, performance degradation, and mechanical failures such as membrane cracking or delamination. In the real market, especially under harsh working environments, long-term stability is a critical quality metric in gas sensor development. Therefore, the pursuit of MEMS gas sensors that offer both high sensitivity and extended lifespan becomes indispensable yet challenging. Thus, this review provides a comprehensive overview of recent studies and achievements in MEMS gas sensors, highlighting efforts aimed at enhancing their working stability. Key areas of focus include advancements in the chemical and physical characteristics of sensing films, as well as improvements in device structures. Furthermore, current limitations, perspectives, and future possibilities for designing and fabricating MEMS gas sensors with long-term stability are discussed.

Indexed as

device structure optimizationlong‐term stabilitymachine olfactoryMEMS gas sensorsensing film degradation

Identifiers

PMID40940593
PMCPMC12533398

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.