ArticleNano letters2025
Metasurfaces with Freely Varying Height in the Visible Using Grayscale Lithography.
Article in Nano letters, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
2 citing papers in PubMed.
- Field-Programmable Mobile Magneto-Photonic Metaparticles for Active Light Manipulation and Steering.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Printable grayscale nano-template for full-colour organic light-emitting diode near-eye displays with 3D achromatic metalenses.Nature communications · 2026Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
5 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Metasurfaces have come to the forefront of optics research due to their unique advantages over conventional glass optics. Metasurfaces are often limited to features that are all the same height due to the use of conventional semiconductor fabrication techniques. In this work, we introduce a grayscale electron-beam lithography step to a well-established atomic layer deposition (ALD)-damascene fabrication process to create dielectric metasurfaces with varying heights that operate in visible wavelengths. We show that this degree of freedom allows for more independent control between the applied dispersion and phase. This comes from quasi-periodic oscillations of both phase and dispersion, which arise as the metasurface top becomes aligned with nodes or antinodes of the standing-wave electric field created at a reflective surface. The enhanced control of these metasurface properties is useful for broadband metasurface applications that require unique tailoring of dispersion, such as retardance correction in large telescopes.
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Registered trials
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