ArticleACS nano2025
Structure-in-Void Quasi-Bound State in the Continuum Metasurface for Deeply Subwavelength Nanostructure Metrology.
Article in ACS nano, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Non-invasive near-field characterization of Bloch mode dispersion in sinusoidally modulated metasurfaces via transient infrared thermography.Scientific reports · 2026Article
- Digital Holography Using Harmonic Generation from Solids for Reconstruction of Subwavelength Nanostructures.ACS photonics · 2026Article
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Fano lineshapes associated with quasi bound-state-in-the-continuum resonances, that are supported by dielectric metasurfaces, have the advantageous properties of being extremely sensitive to minute geometrical changes in the meta-atoms. We show an approach to determine deep subwavelength feature sizes, comparable to semiconductor critical dimension metrology, by structurally infilling a void of a dielectric disk-hole metasurface design. Our simulated results show a sensitivity of 40.5 nm resonant wavelength shift for a 1 nm feature width (i.e., critical dimension) change, at an optical line width of 1.8 nm. We present both experimental and simulated results of different void infillings and attribute the spectral change of the resonance to the sensitivity to an effective index in the void of the meta-atom, which arises from the filled volume fraction and the material boundaries orientation relative to the local polarization. Treating our metasurface as an effective index sensor, the sensitivity is 262 nm·RIU
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