Evidence map›Paper›PMID 40856215›Full record

ArticleSmall (Weinheim an der Bergstrasse, Germany)2025

Scalable Inter-Dielectric Engineering via Vapor-Phase Synthesis Process for Top-Gate MoS

Seohak Park, Mingu Kang, Inseong Lee, Seungsun Yoo, Sejin Kim, Hyeongjin Lim, Woonggi Hong, Min Ju Kim, Cheolmin Park, Jeoungmin Ji and 2 more

Abstract read
In one paragraph

Article in Small (Weinheim an der Bergstrasse, Germany), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Seohak ParkSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Mingu KangSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Inseong LeeSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Seungsun YooGraduate School of Semiconductor Technology, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Sejin KimSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Hyeongjin LimSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Woonggi HongDepartment of Electronics and Electrical Engineering, Department of Convergence Semiconductor Engineering, Dankook University, Yongin-si, Gyeonggi-do, 16890, Republic of Korea.
Min Ju KimDepartment of Electronics and Electrical Engineering, Department of Convergence Semiconductor Engineering, Dankook University, Yongin-si, Gyeonggi-do, 16890, Republic of Korea.
Cheolmin ParkSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Jeoungmin JiSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.ORCID https://orcid.org/0000-0002-5338-7232
Seunghyup YooSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.ORCID https://orcid.org/0000-0003-1887-6118
Sung-Yool ChoiSchool of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.ORCID https://orcid.org/0000-0002-0960-7146

Funding

LG Display C2024004283the Basic Science Institute (National research Facilities and Equipment Center) grand funded by Ministry of Science and ICT RS-2024-00399069the Commercialization Promotion Agency for R&D Outcomes(COMPA) funded by the Ministry of Science and ICT(MSIT) 2710086066the Korea Institute for Advancement of Technology (KIAT) grant funded by the Korea Government (MOTIE) RS-2023-KI002692the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) RS-2025-00514270
6 · The paper itself

Abstract

2D semiconductors are promising channel materials for next-generation thin-film transistors (TFTs) in Internet of Things (IoT) devices. However, their inert, dangling-bond-free surfaces make uniform high-k dielectric integration challenging and can lead to interface defect formation. Here, a scalable inter-dielectric engineering strategy is introduced to address this challenge, using initiated chemical vapor deposition (iCVD) to deposit an ultrathin nonpolar poly(1,3,5-trimethyl-1,3,5-trivinylcyclotrisiloxane) (pV3D3) film as an interlayer between MoS

Indexed as

2D semiconductorflexible electronicsgate‐last processiCVD processMoS2thin‐film transistor

Identifiers

PMID40856215
PMCPMC12548015

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.