Microscopic geared metamachines.

The miniaturization of mechanical machines is critical for advancing nanotechnology and reducing device footprints. Traditional efforts to downsize gears and micromotors have faced limitations at around 0.1 mm for over thirty years due to the complexities of constructing drives and coupling systems at such scales. Here, we present an alternative approach utilizing optical metasurfaces to locally drive microscopic machines, which can then be fabricated using standard lithography techniques and seamlessly integrated on the chip, achieving sizes down to tens of micrometers with movements precise to the sub-micrometer scale. As a proof of principle, we demonstrate the construction of microscopic gear trains powered by a single driving gear with a metasurface activated by a plane light wave. Additionally, we develop a versatile pinion and rack micromachine capable of transducing rotational motion, performing periodic motion, and controlling microscopic mirrors for light deflection. Our on-chip fabrication process allows for straightforward parallelization and integration. Using light as a widely available and easily controllable energy source, these miniaturized metamachines offer precise control and movement, unlocking new possibilities for micro- and nanoscale systems.