ArticleAdvanced science (Weinheim, Baden-Wurttemberg, Germany)2025
Reversing Hydrogen-Related Loss in α-Ta Thin Films for Quantum Device Fabrication.
Article in Advanced science (Weinheim, Baden-Wurttemberg, Germany), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Probing Radical-Induced Magnetic Moment Modulation at Cobalt Interfaces via Soft X-Ray Photoelectron Spectroscopy.Chemistry (Weinheim an der Bergstrasse, Germany) · 2026Article
- Reversing Hydrogen-Related Loss in α-Ta Thin Films for Quantum Device Fabrication.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
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Authors and funding
13 authors.
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Abstract
α-Tantalum (α-Ta) is an emerging material for superconducting qubit fabrication due to the low microwave loss of its stable native oxide. However, hydrogen absorption during fabrication, particularly when removing the native oxide, can degrade performance by increasing microwave loss. This work demonstrates that hydrogen can enter α-Ta thin films when exposed to 10 vol% hydrofluoric acid for 3 min or longer, leading to an increase in power-independent ohmic loss in high-Q resonators at millikelvin temperatures. It is further shown that annealing at 500 °C in ultra-high vacuum (10
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