ArticleMaterials today. Bio2025
Magnetic field-regulated glow discharge sputtering for enhanced depth-profiling and antibacterial analysis of Ag-doped TiN coating.
Article in Materials today. Bio, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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Abstract
A novel satellite-like magnetic field-regulated (SLM) configuration is developed to enhance the depth-profiling and antibacterial analysis of Ag-doped TiN coating on Al substrate (Ag:TiN/Al) using glow discharge mass spectrometry (GDMS). COMSOL simulations reveal that the SLM configuration produces a unique magnetic field distribution through an antiparallel pole arrangement with six-fold symmetry. This creates a distinctive central circular magnetic field, which effectively controls electron motion, enhances central sputtering, and minimizes the edge effect, thereby improving depth-profiling performance. Applied into GDMS analysis of Ag:TiN/Al, SLM configuration achieves an exceptional depth resolution of 0.39 μm and a sputtering rate of 0.23 μm/min, outperforming the non-magnetic condition. It produces a flatter crater profile and increases GDMS signal intensities for
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