Evidence map›Paper›PMID 40623974›Full record

ArticleMicrosystems & nanoengineering2025

Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout.

Ya Zhang, Kazuki Ebata, Mirai Iimori, Qian Liu, Zihao Zhao, Ryotaro Takeuchi, Hua Li, Kazusuke Maenaka, Kazuhiko Hirakawa

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Microsystems & nanoengineering, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

9 authors.

Ya ZhangInstitute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16, Koganei-shi, Tokyo, 184-8588, Japan. zhangya@go.tuat.ac.jp.ORCID http://orcid.org/0000-0001-6108-5261
Kazuki EbataInstitute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16, Koganei-shi, Tokyo, 184-8588, Japan.
Mirai IimoriInstitute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16, Koganei-shi, Tokyo, 184-8588, Japan.
Qian LiuInstitute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16, Koganei-shi, Tokyo, 184-8588, Japan.
Zihao ZhaoInstitute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16, Koganei-shi, Tokyo, 184-8588, Japan.
Ryotaro TakeuchiInstitute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16, Koganei-shi, Tokyo, 184-8588, Japan.
Hua LiShanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China.ORCID http://orcid.org/0000-0003-3689-2437
Kazusuke MaenakaDepartment of Electrical Engineering and Computer Sciences, University of Hyogo, Himeji, Japan.
Kazuhiko HirakawaInstitute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16, Koganei-shi, Tokyo, 184-8588, Japan.ORCID http://orcid.org/0000-0001-5901-662X

Funding

MEXT | Japan Science and Technology Agency (JST) JPMJTR23R2MEXT | Japan Society for the Promotion of Science (JSPS) 21K04151, 24K00937
6 · The paper itself

Abstract

Terahertz (THz) detectors using MEMS resonators have attracted great interests owing to their high sensitivity, rapid response, and room-temperature operation capability. For easy integration with CMOS circuits, silicon (Si) based MEMS detectors are highly desirable. Here we report an uncooled THz bolometer using doubly-clamped Si on insulator (SOI) MEMS beam resonator with piezoresistive readout. When external heat is applied to the MEMS beam, the resonance frequency shifts owing to the thermal strain in the beam, demonstrating a thermal responsivity up to 149 W

Identifiers

PMID40623974
PMCPMC12234989

What OpenQuestion holds

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LicenceCC BY
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.