ArticleMicromachines2025
The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Authors and funding
9 authors.
Funding
Abstract
In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror generate a Lissajous scanning pattern within an artificial eyeball. The scanning pattern reflected from the eyeball is detected by a linear photodiode sensor array (LPSA). The direction and rotation angle of the artificial eyeball result in varying grayscale values across a series of pixels detected by the LPSA, in which the average grayscale values change accordingly. By performing a linear fit between different rotation angles of the same eye movement direction and the corresponding grayscale values, we can determine the correlation between the direction of eye movement and the signal magnitude received by the LPSA, thereby enabling precise eye tracking. The results demonstrated that the minimum resolution was 0.6°. This preliminary result indicates that the system has good accuracy. In the future, this eye-tracking system can be integrated into various wearable glasses devices and applied in various fields, including medicine and psychology.
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