ArticleMicromachines2025
Multiple Ring Electrode-Based PMUT with Tunable Deflections.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
3 citing papers in PubMed.
- Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing.Materials (Basel, Switzerland) · 2026Article
- Beam Drift Mitigation and Wide-Range Measurement in a Miniaturized Ultrasonic Gas Flowmeter.Micromachines · 2026Article
- Structural Optimization Design of the Dual-Layer CMUT with Low Power Consumption and High Ultrasonic Reception Performance.Micromachines · 2025Article
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Authors and funding
5 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Ultrasonic applications such as non-destructive testing, biomedical imaging or range measurements are currently based on piezoelectric bulk transducers. Yet, these kinds of transducers with their mm to cm dimensions are rather impractical in fields in which both frequencies in the kHz region and small-feature sizes are required. This fact mainly relates to the inverse relationship between the resonance frequency constant and the transducers' dimension, yielding a higher frequency and attenuation with a decreasing size. Piezoelectric micromachined ultrasonic transducers (PMUTs), in comparison, incorporate a small-scale µm design while preserving the operating frequency in the desired kHz range. This contribution presents the detailed manufacturing of such a PMUT with a multiple ring electrode‑based structure to additionally adjust the sound pressure fields. The PMUT will be characterized by its deflection in air along with the characterization of the piezoelectric material lead zirconate titanate (PZT) itself. The measurements showed a maximum polarization of 21.8 µC/cm
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