Mapping of Lapping-Induced Subsurface Damage in Planar Fused Silica Glass Based on Polarized Laser Scattering Method.

Mingchuan Gao, Yi Guo, Chenxi Liu, Chuanxin He, Qian Bai

Abstract read

In one paragraph

Article in Materials (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

Authors and funding

5 authors.

Mingchuan GaoState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China.

Yi GuoState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China.

Chenxi LiuState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China.

Chuanxin HeState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China.

Qian BaiState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China.ORCID 0000-0002-2591-5464

Funding

National Key Research and Development Plan of China 2022YFB3403602

6 · The paper itself

Abstract

Fused silica glass is a critical material in many industries due to its superior physicochemical properties. The detection of subsurface damage (SSD) poses fundamental challenges that directly affect the performance of fused silica glass. The polarized laser scattering (PLS) detection method has significant advantages in SSD detection, but damage mapping has not yet been achieved. This paper proposes an SSD mapping method based on the PLS detection results. The relationship between the PLS detection signals and the SSD depths of fused silica glass is established, and an SSD mapping diagram is successfully generated. Unlike existing studies that only provide local quantitative SSD depth, SSD mapping achieves simultaneous visualization of SSD location, depth, and uniformity of SSD distribution across the entire region, which provides guidance to determine the lapping or polishing parameters in the subsequent processes.

Indexed as

fused silica glassmappingpolarization laser scattering detectionsubsurface damage

Identifiers

PMID40508415

DOI10.3390/ma18112417

PMCPMC12156065

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LicenceCC BY

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.