ArticleMicrosystems & nanoengineering2025
Silicon-based MEMS/NEMS empowered by graphene: a scheme for large tunability and functionality.
Article in Microsystems & nanoengineering, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
What it found
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The trial behind it
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Who cites it
3 citing papers in PubMed.
- Nanosecond, Nanometer Movies of MEMS/NEMS Dynamics in a Standard SEM Using Time-Tagged Secondary Electrons.Small methods · 2026Article
- Two-Dimensional Layered Materials for Aqueous Zinc-Ion Batteries: Multifunctional Roles and Mechanistic Insights.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Review
- Molecular Dynamics Simulation of Texture Contact Friction Between Crystalline Silicon Layers for Application in Micro-Nano System Devices.Molecules (Basel, Switzerland) · 2025Article
Corrections and comments
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Authors and funding
6 authors.
Funding
Abstract
Integration of graphene in silicon-based micro-/nanoelectromechanical systems (MEMS/NEMS) marries the robustness of silicon-based materials with the exceptional physical properties of graphene, drastically enhancing the system's regulation performance which now is key for many advanced applications in nanotechnology. Here, we experimentally demonstrate and theoretically analyze a powerful on-chip integration principle consisting of a hybrid graphene/silicon nitride membrane with metallic leads on top that enables an extremely large static and dynamic parameter regulation. When a static voltage is applied to the leads of the integrated structure, a spatially confined localized electrothermomechanical (ETM) effect results in ultra-wide frequency tuning, deformation (buckling transition) and regulation of the mechanical properties. Moreover, by injecting an alternating voltage to the leads, we can excite the resonator vibrating even far beyond its linear regime without a complex and space consuming actuation system. Our results prove that the scheme provides a compact integrated system possessing mechanical robustness, high controllability, and fast response. It not only expands the limit of the application range of MEMS/NEMS devices, but also enables the further miniaturization of the device. The graphene integrated MEMS/NEMS empowered by graphene: a scheme for strong enhancements of tunability and functionality of silicon based device device consists of a hybrid graphene/silicon-nitride membrane with metallic leads that enables ultra-wide frequency tuning, spatial deflection, mechanical properties tuning and on-surface actuation.
Identifiers
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.