ArticleACS applied materials & interfaces2025
High-Performance Plasmonic Hafnium Nitride Nanocavity and Nanodisk Arrays for Enhanced Refractometric Sensing.
Article in ACS applied materials & interfaces, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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3 citing papers in PubMed.
- Sputtering: A Versatile Technology to Deposit Multifunctional Protective Coatings.Materials (Basel, Switzerland) · 2026Review
- Hexagonal Au Nanostructure SERS Metasurface for AI-Driven Detection of Pesticide Residues in Real Food Samples.ACS applied nano materials · 2026Article
- Plasmon-Enhanced Raman Sensing with Metal-Insulator-Metal Metasurfaces.ACS applied materials & interfaces · 2026Article
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7 authors.
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Abstract
We report on the deposition and thorough characterization of plasmonic hafnium nitride (HfN) thin films, along with the fabrication of HfN nanocavity and nanodisk arrays for refractometric sensing in the visible-near-infrared (Vis-NIR) range. By optimizing reactive RF magnetron sputtering parameters, we achieved high-quality HfN thin films with tunable properties, confirmed through extensive structural, compositional, and optical analyses: grazing-incidence X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy, Hall-effect measurements, and variable angle spectroscopic ellipsometry. Our optimized HfN films display a gold-like color with metallic behavior down to ∼360 nm, high free-carrier concentration, and minimal energy losses. Using electron-beam lithography, we patterned HfN nanocavity and nanodisk arrays on fused silica substrates. The nanocavity arrays exhibit a grating-coupled surface plasmon polariton (SPP) tunable by adjusting the lattice periodicity, yielding a bulk refractive index sensitivity of up to 636 nm·RIU
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