ArticleCommunications engineering2025
A polymer-based MEMS loudspeaker featuring a partially stiffened membrane actuated by a PZT thin film.
Article in Communications engineering, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Thickness-confined metastable phase transitions drive large piezoelectricity in ultrathin BiFeOScience advances · 2026Article
- Laser-Architected Shape-Configurable Vertical Graphene Thermoacoustic Loudspeakers for 3D Acoustic Emission.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
Corrections and comments
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Miniaturized loudspeakers are increasingly relevant for wearable and transparent electronics, but achieving consistent acoustic performance, particularly at low frequencies, remains a challenge. Here we show a polymer-based loudspeaker that features a partially stiffened membrane actuated by a transferred thin film of lead zirconate titanate. The flexible polymer reduces overall stiffness, while the localized stiffening broadens the frequency response. The piezoelectric film is integrated through a transfer process that employs a donor substrate. We evaluate functionality through electrical, mechanical, acoustic, and optical measurements, including sound pressure level and resonance frequency, in both open field and in-ear conditions. The results confirm the device's ability to operate under different acoustic loads and demonstrate compatibility of the fabrication process with flexible and transparent substrates. This approach enables the integration of transparent piezoelectric actuators and is suitable for compact, bendable, and optically transparent audio systems.
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Registered trials
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